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Micafluid sf6 o2 Collection pdf

Micafluid sf6 o2 Collection pdf

In situ x-ray photoelectron spectroscopy analysis of SiO xF y passivation layer obtained in a SF 6/O 2 cryoetching process J. Pereira,1 L. E. Pichon,1,2 R. Dussart,1,a C. Cardinaud,3 C. Y. Duluard,1

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